非硅工艺-微细特种加工

Micro Manufacturing Based onElectro Machining丁玉成

2010-10-11

非硅工艺-微细特种加工

OutlineIntroduction Fabrication of Micro Electrode Micro Removal Machining Micro Depositing Machining Conclusions& Prospect

2010-10-11

非硅工艺-微细特种加工

IntroductionOne of Modern Manufacturing Aims: Micro& Fine Method: Micro Machining Micro Electrical Machining (Micro-EDM and Micro-ECM): Very Good, Important and Special Methodn n n

capability of 3D machining wide range of machinable materials reversible machining

2010-10-11

非硅工艺-微细特种加工

OutlineIntroduction Fabrication of Micro Electrode Micro Removal Machining Micro Depositing Machining Conclusions& Prospect

2010-10-11

非硅工艺-微细特种加工

2010-10-11

非硅工艺-微细特种加工

2010-10-11

非硅工艺-微细特种加工

2010-10-11

非硅工艺-微细特种加工

Fabrication of Micro Electrode増沢隆久/Takahisa MASUZAWATokyo University, Japan

Micro 2.5µm Electrode Punch

WEDG2010-10-11

5µm Holes

Micro abnormal shape hole

非硅工艺-微细特种加工

4.研究工作基础

哈工大自行研制的微纳米特种加工平台2010-10-11

非硅工艺-微细特种加工

Fabrication of Micro ElectrodeWire Electrical Discharge Grinding Device Designed by Harbin Institute of Technology

30µm Electrode2010-10-11

非硅工艺-微细特种加工

哈工大用微细电化学加工的样品实例

2010-10-11

非硅工艺-微细特种加工

半球面 R130µm

三维文字，宽 20µm涡轮盘， 3mm

自由曲面 1mm×0.3mm×0.18mm

哈工大应用微细电火花加工技术加工的微三维结构

2010-10-11

非硅工艺-微细特种加工

Fabrication of Micro ElectrodeTokyo University, Japan

毛利尚武/Naotake MOHRI武沢英樹/Hideki TAKEZAWAR< 1µm

Micro Electrode and Its Tip Manufactured by Single Pulse Discharge2010-10-11

非硅工艺-微细特种加工

Fabrication of Micro ElectrodeHarbin Institute of Technology, China

Single Pulse Discharge Method180 Diameter of Electrode (μm) 160 140 120 100 80 60 40 20 0 0 200 400 600 800 1000 1200

Pulse Width Tim e(μs)

L 350µm 1400 30µm Tip Radius 100 nm

R≈100nm

2010-10-11

非硅工艺-微细特种加工

Micro EDM machining center2010-10-11

非硅工艺-微细特种加工

Fabrication of Micro ElectrodeChai SHKorea Scholar

Micro ECM Method

L 3 mm 30µm

2010-10-11

非硅工艺-微细特种加工

OutlineIntroduction Fabrication of Micro Electrode Micro Removal Machining Micro Depositing Machining Conclusions& Prospect

2010-10-11

非硅工艺-微细特种加工

Micro Removal Machining–祖元余/Zuyuan YuUNL Non-traditional Manufacturing Center, US

Micro EDM

Micro Automobile Mould

2010-10-11

MG-ED72, Japan

非硅工艺-微细特种加工

Micro Removal Machining–3D Micro Structure UNL Non-traditional Manufacturing Center US

Micro EDM

Micro Turbo

Micro Cantilever Structure On Single Crystal Silicon Manufactured by Micro-EDM Japan

Micro S Shape Structure University of Luewen Catholicism Belgium

2010-10-11

非硅工艺-微细特种加工

Micro Removal Machining–Micro Step Motor 10×10×5 mmSandia National Lab US

Micro EDM

Fiber Linker81 Micro Holes 120µm

Optimation Inc. US

Micro Clamp with Sensor MiTech Lab Italy2010-10-11

Micro Complex Mould Belgium

非硅工艺-微细特种加工

Micro Removal Machining–Micro Gear Pump Array Stickup

Micro WEDM

Micro Catheter

37µm

Workpieces Manufactured By Micro WEDM2010-10-11

Berkenboff, Germany