铌酸盐无铅压电薄膜的脉冲激光沉积制备研究(4)

发布时间:2021-06-06

 第1期漆 婷等:La3Ga5.5Ta0.5O14晶体的生长及性能研究99 

  根据布喇格定律计算得到LGT晶体参数:X

θ=43°θ=21°标准面定向参数为258′,59′;Y标准面θ=37°θ=18°定向参数为250′,55′;Z标准面定向θ=35°θ参数为2,=17°30′。

327.[2]

CUNHAMPD,MALOCHADC.ExperimentalandperdictedSAWtemperaturebehavioroflangatate[C].SaoPauloBrazil:2000IEEEULTrasonicsSymposium,2000:2452248.[3]

BOHMJ,CHILLAE,FLANNERYC,etal.Cao2chrlskigrowthandcharacterizationofpiezoelectricsin2glecrystalswithlangasitestructure:La3Ga5SiO14(LGS),La3Ga5.5Nb0.5O14(LGN)andLa3Ga5.5Ta0.5O14(LGT)II.piezoelectricandelasticproperties[J].JournalofCrystalGrowth,2000,216:2932298.[4][5][]

4 结束语

本实验小组已生长出 54mm×140mm的

LGT晶体,并对晶体的压电常数、介电常数、透光光谱及其声表面波器件部分性能进行测试。实验结果表明,LGT晶体的压电常数很大,且X切Z方向传

2

播的机电耦合系数kp可达0.513%,说明LGT晶体具有优异的压电性能,在声表面波器件上具有广阔的应用前景。参考文献:

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