RESR angular encoder system data sheet 雷尼绍 光栅尺

发布时间:2024-11-17

雷尼绍 光栅尺 定位、监测、高精度。

Data sheet

L-9517-9128-04-C

RESR angle encoder system

The RESR is a one-piece System features

High speed, non-contact, stainless steel ring with

optical performancegraduations marked directly

Graduation accuracy to onto the periphery.

The RESR offers impressive accuracy with

resolution to 0.008 arc second, suiting the most demanding precision applications.Read by Renishaw’s filtering optics readheads, including the RGH20, RGH34, RGH35 and RGH40, the system has a high tolerance to dirt, scratches and greasy fingerprints that can cause other encoder systems to miscount.The low profile RESR, with a large internal diameter, is easy to design into most

installations. More importantly, its low mass, low inertia design will not compromise system performance. A repeatable reference mark is available to provide a home (datum) position, while Renishaw’s RGH40 readhead with filtering optics offers dual limit sensors.

UHV compatible

Low magnetic permeability as standard

Compact size for easy integration

Low mass and low inertia Compatible with RGH20, RGH34, RGH35 or RGH40 readheads to offer industry standard analogue or digital incremental outputs with reference mark option Integral set-up LED on all Renishaw encoders for quick set-up and instant “health check” at any time Ultra-low inertia versions also available in 75 mm 100 mm, 150 mm and

200 mm sizes

± 0.5 arc second Angular resolution to 0.008 arc second System repeatability to 0.008 arc second

Wide range of sizes and line counts provide compatibility with industry standard controllers (Ø52 mm to Ø550 mm with line counts from 4,096 to 86,400) Patented taper mount simplifies integration and minimises installation errors Filtering optics provide excellent dirt immunity

雷尼绍 光栅尺 定位、监测、高精度。

Data sheet

RESR angle encoder system

Installation drawing (‘A’ section)

Nominal external diameter (mm)Line countDO (mm)DI (mm)Mounting Holes

DH (mm)

N

20 µm pitch40 µm pitch

528,1924,09652.20 52.1030.04 30.0040630°

579,0004,50057.35 57.2537.04 37.0047630°

75

100

103

104

General outline and dimensions Dimensions and tolerances in mm

11,84015,74416,20016,3845,920

7,872

8,100

8,192

75.40 100.30 103.20 104.40 75.30100.20103.00104.2055.04 55.0065630°

80.04 80.0090630°

80.04 80.0090630°

80.04 80.0090630°

θ

Nominal external diameter (mm)Line countDO (mm)DI (mm)Mounting Holes

DH (mm)

N

20 µm pitch40 µm pitch

255300350413417550

40,00047,20055,04064,80065,53686,40020,00023,60027,52032,40032,76843,200254.80 300.40 350.40 412.70 417.40 550.20 254.40300.20350.20412.30417.00549.80235.06 280.06 330.06 392.08 380.10 510.10 235.00280.00330.00392.00380.00510.002451215°

2901611.25°

3401611.25°

4021810°

3901810°

520209°

Note: θ is the angle between one tapped hole and the adjacent clearance hole.

For example, the angle between two clearance holes is 2θ.

θ

Installation drawing (‘B’ section)

Nominal external diameter (mm)Line countDO (mm)DI (mm)Mounting Holes

DH (mm)

N

20 µm pitch40 µm pitch

75

100

150

200

11,84015,74423,60031,4885,920

7,872

11,80015,744

75.40 100.30 150.40 200.40 75.30100.20150.20200.2055.04 55.0061630°

80.04 130.04 180.04 80.00130.00180.0086630°

136920°

1861215°

θ

Section A-A

Note: θ is the angle between one tapped hole and the adjacent clearance hole. For example, the angle between two clearance holes is 2θ.

雷尼绍 光栅尺 定位、监测、高精度。

RGH20 on ‘A’ section RESR General outline and dimensions. Dimensions and tolerances in mm

(Please see RESR Installation guide M-9559-0675 for installation drawings of RGH34, RGH35 and RGH40 mounted on RESR)

readhead optical centreline

readhead optical centreline

RESR centre of rotation

RGH20 reference mark options

(Please see RESR Installation guide M-9559-0675 for details of reference mark options for RGH34, RGH35 and RGH40)

雷尼绍 光栅尺 定位、监测、高精度。

Data sheet

RESR angle encoder system

Mounting options

For further information on installation and mounting options, please refer to the RESR installation guide, which is available from your local representative, or can be downloaded from http://

Operating specifications

Material

Coefficient of expansion Temperature

303/304 stainless steel17 ± 0.3 µm/m/°C (ppm/°C)Storage Operating

}

Determined by the readhead. Please refer to the Data sheet of the Renishaw readhead you will use.

Nominal external diameterNominal internal diameter

'A' section

Mass (kg)

'B' section'A' section'B' section

52 mm30 0.1 – 47 –

57 mm37 0.1 – 63 –

75 mm55 0.15 0.07 160 78

100 mm80 0.2 0.1 420 200

103 mm80 0.25 – 510 –

104 mm80 0.25 – 550 –

115 mm95 0.25 – 640 –

150 mm130 0.3 0.15 1,600 720

200 mm180 0.4 0.2 3,800 1,800

206 mm186 0.45 – 4,300 –

Moment of inertia (kgmm2)

Nominal external diameterNominal internal diameter

'A' section

Mass (kg)

'B' section'A' section'B' section

209 mm186 0.5 – 4,900 –

229 mm209 0.5 – 5,900 –

255 mm235 0.55 – 8,000 –

300 mm280 0.65 – 14,000 –

350 mm330 0.75 – 22,000 –

413 mm392 0.9 – 37,000 –

417 mm380 1.76 – 70,000 –

550 mm510 2.67 – 188,000

Moment of inertia (kgmm2)

雷尼绍 光栅尺 定位、监测、高精度。

Maximum speed (rpm)

For RGH20 readhead reading from 20 µm pitch rings.

For details of maximum speeds for other readhead resolution/ring options, please contact your local representative.

Nominal external diameter52 mm 57 mm 75 mm 100 mm 103 mm 104 mm 115 mm 150 mm 200 mm 206 mm 209 mm 229 mm 255 mm 300 mm 350 mm 413 mm 417 mm 550 mm

Line count20 µm8,192 9,000 11,840 15,744 16,200 16,384 18,000 23,600 31,488 32,400 32,768 36,000 40,000 47,200 55,040 64,800 65,536 86,400

5 µm2,938 2,680 2,037 1,527 1,483 1,469 1,328 1,018 763 741 731 667 599 509 436 370 366 278

1 µm1,836 1,675 1,273 954 926 918 830 636 477 463 457 417 374 318 272 231 229 174

0.5 µm1,101 1,005 763 572 556 550 498 381 286 277 274 250 224 190 163 138 137 104

Digital readhead resolution0.2 µm*257 235 178 134 130 129 116 89 67 65 64 58 52 45 38 32 32 24

0.1 µm 257 235 178 134 130 129 116 89 67 65 64 58 52 45 38 32 32 24

50 nm 129 117 89 67 65 64 58 45 33 32 31 29 26 22 19 16 16 12

20 nm 110 101 76 57 56 55 50 38 29 28 27 25 22 19 16 14 14 10

10 nm

55 50 38 29 28 28 25 19 14 14 14 13 11 10 8.2 6.9 6.9 5.2

Analogue1 Vpp1,652 1,507 1,146 859 834 826 747 573 429 417 411 375 337 286 245 208 206 156

*6 MHz version 12 MHz version RGH20F with RGF interface

Maximum speed (rpm)

For RGH40 readhead reading from 40 µm pitch rings.

For details of maximum speeds for other readhead resolution/ring options, please contact your local representative.

Nominal external diameter52 mm 57 mm 75 mm 100 mm 103 mm 104 mm 115 mm 150 mm 200 mm 206 mm 209 mm 229 mm 255 mm 300 mm 350 mm 413 mm 417 mm 550 mm

**20 MHz version

Line count40 µm4,096 4,500 5,920 7,872 8,100 8,192 9,000 11,800 15,744 16,200 16,384 18,000 20,000 23,600 27,520 32,400 32,768 43,200

10 µm3,687 3,352 2,553 1,911 1,858 1,840 1,662 1,274 955 927 915 834 749 637 546 463 458 347

5 µm2,938 2,680 2,037 1,527 1,483 1,469 1,328 1,018 763 741 731 667 599 509 436 370 366 278

2 µm2,209 2,011 1,532 1,146 1,114 1,104 997 764 573 556 549 501 449 382 328 278 275 208

Digital readhead resolution

1 µm1,472 1,341 1,021 764 743 736 665 510 382 371 366 334 300 255 218 185 183 139

0.2 µm**918 838 637 477 464 460 415 318 239 232 229 209 187 159 136 116 114 87

0.1 µm**479 436 332 248 241 239 216 166 124 121 119 108 97 83 71 60 59 45

50 nm**221 201 153 115 111 110 100 76 57 56 55 50 45 38 33 28 27 20

Analogue1 Vpp2,938 2,680 2,037 1,527 1,483 1,469 1,328 1,018 763 741 731 667 599 509 436 370 366278

雷尼绍 光栅尺 定位、监测、高精度。

Data sheet

RESR angle encoder system

Resolution

The RESR offers a range of standard ring diameters, as well as sizes that offer line counts that provide 2n counts per revolution or resolutions that are precise sub-divisions of degrees or arc seconds.

Note: 1 arc second resolution = 1.296 x 106 counts per revolution = 2.778 x 10-4 degree resolution.

20 µm pitch RESR

Nominal external diameter (line count)75 mm (11,840)100 mm (15,744)150 mm (23,600)

Standard outside diameters

200 mm (31,488)300 mm (47,200)350 mm (55,040)550 mm (86,400)52 mm (8,192)104 mm (16,384)209 mm (32,768)417 mm (65,536)57 mm (9,000)

Subdivisions

of degrees

115 mm (18,000)229 mm (36,000)103 mm (16,200)

Subdivisions

of arc second

206 mm (32,400)255 mm (40,000)413 mm (64,800)

RGH20 digital resolution (interpolation factor)

5 µm (x 4)

1 µm (x 20)

0.5 µm (x 40)

0.2 µm (x 100)

0.1 µm (x 200)

50 nm (x 400)

20 nm* (x 1000)

10 nm* (x 2000)

≈27.4"≈20.6"≈13.7"≈10.3"≈6.9"≈5.9"≈3.75"≈39.6"≈19.8"≈9.89"≈4.9"

0.01°0.005°0.0025°20"10"8.1"5"

≈5.47"≈4.12"≈2.75"≈2.06"≈1.37"≈1.18"≈0.75"≈7.9"≈3.96"≈1.98"≈0.99"

0.002°0.001°0.0005°4"2"1.62"1"

≈2.74"≈2.06"≈1.37"≈1.03"≈0.69"≈0.59"≈0.38"≈3.96"≈1.98"≈0.99"≈0.49"

0.001°0.0005°0.00025°

2"1"0.81"0.5"

≈1.1"≈0.82"≈0.55"≈0.41"≈0.27"≈0.24"≈0.15"≈1.58"≈0.79"≈0.4"≈0.2"

0.0004°0.0002°0.0001°0.8"0.4"0.32"0.2"

≈0.55"≈0.41"≈0.27"≈0.21"≈0.14"≈0.12"≈0.08"≈0.79"≈0.4"≈0.2"≈0.1"

0.0002°0.0001°0.00005°0.4"0.2"0.16"0.1"

≈0.27"≈0.21"≈0.14"≈0.1"≈0.069"≈0.059"≈0.04"≈0.4"≈0.2"≈0.1"≈0.05"

0.0001°0.00005°0.000025°0.2"0.1"0.081"0.05"

≈0.11"≈0.082"≈0.055"≈0.041"≈0.027"≈0.024"≈0.015"≈0.16"≈0.08"≈0.04"≈0.02"

0.00004°0.00002°0.00001°0.08"0.04"0.032"0.02"

≈0.055"≈0.041"≈0.027"≈0.021"≈0.014"≈0.012"≈0.008"≈0.08"≈0.04"≈0.02"≈0.01"

0.00002°0.00001°0.000005°0.04"0.02"0.016"0.01"

2n line count

*Resolutions achieved using RGH20F with RGF interface Line count as a multiple of 1000

雷尼绍 光栅尺 定位、监测、高精度。

40 µm pitch RESR

Nominal external diameter (line count)75 mm (5,920)100 mm (7,872)150 mm (11,800)

Standard outside diameters

200 mm (15,744)300 mm (23,600)350 mm (27,520)550 mm (43,200)52 mm (4,096)104 mm (8,192)209 mm (16,384)417 mm (32,768)57 mm (4,500)

Subdivisions

of degrees

115 mm (9,000)229 mm (18,000)103 mm (8,100)206 mm (16,200)255 mm (20,000)413 mm (32,400)

RGH40 digital resolution (interpolation factor)

10 µm (x 4)

5 µm (x 8)

2 µm (x 20)

1 µm (x 40)

0.2 µm (x 200)

0.1 µm (x 400)

50 nm (x 800)

≈54.7"≈41.2"≈27.5"≈20.6"≈13.8"≈11.8"≈7.5"≈79.1"≈39.6"≈19.7"≈9.9"

0.02°0.01°0.005°40"20"16.2"10"

≈27.4"≈20.6"≈13.7"≈10.3"≈6.9"≈5.9"≈3.75"≈39.6"≈19.8"≈9.89"≈4.9"

0.01°0.005°0.0025°20"10"8.1"5"

≈11"≈8.23"≈5.5"≈4.12"≈2.75"≈2.36"≈1.5"≈15.8"≈7.91"≈3.96"≈1.98"

0.004°0.002°0.001°8"4"3.24"2"

≈5.47"≈4.12"≈2.75"≈2.06"≈1.37"≈1.18"≈0.75"≈7.9"≈3.96"≈1.98"≈0.99"

0.002°0.001°0.0005°4"2"1.62"1"

≈1.1"≈0.82"≈0.55"≈0.41"≈0.27"≈0.24"≈0.15"≈1.58"≈0.79"≈0.4"≈0.2"

0.0004°0.0002°0.0001°0.8"0.4"0.32"0.2"

≈0.55"≈0.41"≈0.27"≈0.21"≈0.14"≈0.12"≈0.08"≈0.79"≈0.4"≈0.2"≈0.1"

0.0002°0.0001°0.00005°0.4"0.2"0.16"0.1"

≈0.27"≈0.21"≈0.14"≈0.1"≈0.069"≈0.059"≈0.04"≈0.4"≈0.2"≈0.1"≈0.05"

0.0001°0.00005°0.000025°0.2"0.1"0.081"0.05"

2n line count

Subdivisions

of arc second

Line count as a multiple of 1000

雷尼绍 光栅尺 定位、监测、高精度。

Renishaw plc

New Mills, Wotton-under-Edge, Gloucestershire GL12 8JR United Kingdom

T +44 (0)1453 524524F +44 (0)1453 524901E uk@http://

http://

Accuracy

Nominal external

diameter

52 mm 57 mm 75 mm 100 mm 103 mm 104 mm 115 mm 150 mm 200 mm 206 mm 209 mm 229 mm 255 mm 300 mm 350 mm 413 mm 417 mm 550 mm

Graduation error (arc second)

± 4.0 ± 3.6 ± 2.8 ± 2.1 ± 2.0 ± 2.0 ± 1.8 ± 1.4 ± 1.0 ± 1.0 ± 1.0 ± 0.9 ± 0.8 ± 0.7 ± 0.6 ± 0.5 ± 0.5 ± 0.4

System error (arc second) for 20 µm systems

± 5.6 ± 5.1 ± 3.9 ± 2.9 ± 2.8 ± 2.8 ± 2.5 ± 1.9 ± 1.4 ± 1.4 ± 1.4 ± 1.3 ± 1.1 ± 1.0 ± 0.8 ± 0.7 ± 0.7 ± 0.5

System error (arc second) for 40 µm systems

± 6.3 ± 5.8 ± 4.4 ± 3.3 ± 3.2 ± 3.2 ± 2.9 ± 2.2 ± 1.7 ± 1.6 ± 1.6 ± 1.4 ± 1.3 ± 1.1 ± 0.9 ± 0.8 ± 0.8 ± 0.6

Graduation error is the maximum difference between the angle measured by a single readhead and the true rotation of the encoder as graduated. Application disturbances such as eccentricity are not included.System error is graduation error plus SDE.

Effects such as eccentricity influence installed performance; for application advice please contact your local representative.

For worldwide contact details, please visit our main website at http:///contact

RENISHAW® and the probe emblem used in the RENISHAW logo are registered trademarks of Renishaw plc in the UK and other countries. apply innovation is a trademark of Renishaw plc.

© Renishaw plc 2002-2008 Issued 0108 Renishaw reserves the right to change specifications without notice

*L-9517-9128-04*

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