Data sheet

L-9517-9426-02-A

UHV encoder system

UHV encoder offers all

ts of the established

linear and angle

encoder systems, in a readhead that has been designed and constructed using Ultra-High Vacuum compatible materials and processes.

The UHV readhead is complemented by the latest evolution of RGSZ20 gold tape scale, along with a range of highly accurate linear and angle encoder scales, all featuring optical IN-TRAC reference marks, easy installation,

rugged construction and proven clean RGA spectra. For ultimate reliability and high immunity to optical degradation, UHV readheads incorporate third-generation ltering optics, tuned for even lower noise (jitter), further enhanced by dynamic signal processing including Auto Gain Control and Auto Offset Control.

The result is low sub-divisional error (SDE) giving smoother velocity control for improved scanning performance and increased positional stability. UHV readheads also

feature a detachable analogue or digital interface in the form of a robust, convenient connector that can be located up to 10 mfrom the readhead.

The interface offers digital

interpolation to 1 nm resolution, with clocked outputs for optimised speed performance at all resolutions for industry-standard controllers.The readhead carries an integral set-up LED that enables quick and easy installation. All of these readheads are supplied with an RFI screened UHV compatible cable as standard.

Clean RGA

Low outgassing rates High bake-out temperature of 120 °C

Low power consumption readheads

Non-contact open optical system

Resolution to 1 nm

Dynamic signal processing provides ultra low cyclic error of typically ±30 nm Auto Gain Control ensures constant signal strength for long term reliability

Compatible with RGSZ20 gold scale, FASTRACK/RTLC scale system, RSLM, RELM, RESM and REXM

Data sheet

TONiC UHV encoder system

UHV readhead installation drawing

Dimensions and tolerances in mm

NOTE: RGSZ20 only shown. For detailed installation drawings, refer to relevant TONiC Installation guide or Data sheet

Ti/TD interface installation drawing

Dimensions and tolerances in mm

Data sheet

TONiC UHV encoder system

Operating and electrical speci cations

Power supply

Temperature (system)

(readhead) Humidity (system)

5V ±10% Ripple Storage Operating Bakeout

Readhead only <100 mAT16xx/T26xx + Ti0000 <100 mA

T16xx/T26xx + Ti0004 - Ti20KD or TD4000 - TD0040 <200 mANOTE: Current con sump tion g ures refer to unterminated systems.

For digital outputs, a fur ther 25 mA per chan nel pair (eg A+, A-) will be drawn when ter mi nat ed with 120 Ω.

For analogue outputs, a further 20 mA will be drawn when terminated with 120 Ω.Power from a 5 V dc supply complying with the requirements for SELV of standard EN (IEC) 60950.

200 mVpp maximum @ frequency up to 500 kHz-20 °C to +70 °C 0 °C to +70 °C120 °C

Rated up to 40 °C, 95% relative humidity (non-condensing)IP20IP20

500 m/s² BS EN 60068-2-7:1993 (IEC 68-2-7:1983)

Sealing (readhead) (interface) Acceleration (readhead) Shock (system) Vibration (system) Mass

EMC compliance (system) Environmental Readhead cable

Operating

Non-operating 1000 m/s², 6 ms, ½ sine BS EN 60068-2-27:1993 (IEC 68-2-27:1987)Operating Readhead Interface Cable

100 m/s² max @ 55 Hz to 2000 Hz BS EN 60068-2-6:1996 (IEC 68-2-6:1995)10 g100 g14 g/m

BS EN 61326-1: 2006

Compliant with EU Directive 2002/95/EC (RoHS)Tinned copper braided single screen. FEP core insulation

Speed

Minimum receiver clock frequency

(MHz)5040252012108641

Analogue output

Ti0004

5 µm1010101010101010104.2

Ti00201 µm1010101098.106.484.503.370.84

Ti00400.5 µm10108.106.754.504.003.242.251.680.42

Ti01000.2 µm6.485.403.242.701.801.621.290.900.670.16

Maximum speed (m/s)Ti02000.1 µm3.2402.7001.6201.3500.9000.8100.6480.4500.3380.084

Ti040050 nm1.6251.3500.8100.6700.4500.4000.3240.2250.1690.04210 (-3dB)

Ti100020 nm0.6480.5400.3240.2700.1800.1620.1300.0900.0680.017

Ti200010 nm0.3240.2700.1620.1350.0900.0810.0650.0450.0340.008

Ti40005 nm0.1620.1350.0810.0680.0450.0410.0320.0230.0170.004

Ti10KD2 nm0.0650.0540.0320.0270.0180.0160.0130.0090.00680.0017

Ti20KD1 nm0.0320.0270.0160.0130.0090.00810.00650.00450.00340.0008

Angular speed depends on ring diameter - use the following equation to convert to rev/min. Angular speed (rev/min) =

V x 1000 x 60

D

Where V = maximum linear speed (m/s) and D = external diameter of RESM or REXM (mm)

TD interface maximum speeds are resolution dependent as de ned above.

Data sheet

TONiC UHV encoder system

System features

Reference mark

Form

Selection

Repeatability

IN-TRAC reference mark, directly in incremental track

Refer to RGSZ, FASTRACK/RTLC, RELM, RSLM, RESM, RESD or REXM Data sheets for reference mark location

Bi-directionally repeatable across full speed and temperature rangeElectronically phased, requires no physical adjustment

T16x0: Single reference mark selection by magnetic actuator (A-9653-0143), customer positionedT16x1 and T26x1: No selector required, all reference marks outputUnit of resolution repeatability, over full operating temperature and speed

Dual limit switches (linear systems only, not available on TD interfaces)

Form

Magnetic actuators for P and Q limit switches 10 mm P limit, North pole facing – A-9653-013810 mm Q limit, South pole facing – A-9653-013920 mm P limit, North pole facing – A-9653-023720 mm Q limit, South pole facing – A-9653-023850 mm P limit, North pole facing – A-9653-023550 mm Q limit, South pole facing – A-9653-0236

Trigger point

Typical P magnet Typical Q magnet

Leading edge of magnet from direction of travel

Trigger point tolerance

Readhead

direction of travel

(RGSZ scale shown)

Mounting Position

Self-adhesive (same as RGSZ-S scale)Customer placed at desired locations

Repeatability <0.1 mm

Dynamic signal processing

Real time signal conditioning for optimized performance across a range of operating conditions– Automatic Gain Control (AGC)– Automatic Offset Control (AOC)Ultra low cyclic error of typically ±30 nm

Calibration

Simple calibration at the press of a button, no physical adjustment requiredOptimization of incremental and reference mark signals

TD dual resolution interface

Allows output to be switched between two resolutions.

NOTE: It is recommended that movement should be halted before switching resolutions.See part number section for details of available resolutions.No limit outputs

Data sheet

TONiC UHV encoder system

RGA results

Test schedule

A quadrupole mass spectrometer (AccuQuad 200 RGA), set to 200AMU scan range, was used to collect RGA (residual gas analysis) data and to measure total chamber pressure. After initial conditioning of the system, a background spectrum was recorded together with the total pressure in the test chamber.

The component was placed in the vacuum chamber (0.015 m3) and the system was then pumped using an KJL Lion 802 (800/s) diode ion pump and a Divac diaphragm pump at ambient temperature for 24 hours, after which a background scan and the total pressure in the test chamber were recorded again. If the system pressure was better than 5 x 10-9 mbar, the test specimen was baked at 120 °C for 48 hours. The system was then allowed to cool to ambient temperature before a nal mass spectrum and the total pressure in the test chamber were recorded. These nal RGA scans are shown below.

NOTE: Exact reproduction of these results should not be expected, as RGA data depends on many factors including

environmental factors and initial chamber conditions. However, the data is fully representative of vacuum performance.

readhead with 1.0 m cable after bake-out (total pressure = 9.0 x 10-10

mbar)

Partial pressure/mbar

Mass/AMU

RSLM linear scale (180 mm length) with 2 clips and 1 clamp after bake-out (total pressure = 3.0 x 10-10

mbar)

Partial pressure/mbar

Mass/AMU

RGSZ-S linear scale (300 mm length) after bake-out (total pressure = 1.69 x 10-10

mbar)

Partial pressure/mbar

RESR (Ø115 mm) after bake-out (total pressure = 7.76 x 10-10

mbar)

Partial pressure/mbar

Data sheet

TONiC UHV encoder system

Connector pin con guration

Digital outputs

InterfaceTi0004 -

Ti20KD

Function

Power

Signal5 V0 V

Incremental

A+A-B+B-Reference mark

Z+Z-Limits

P Q

Set-upAlarm

XE+E-Resolution switching Shield

–InnerOuter

Analogue outputs

Readhead T1xxx/2xxx

Function

Power

Signal5 V0 V

Incremental

Cosine

TD4000 - TD0040Pin7, 82, 9146135124––111310–Case

Set-upRemote CALShieldLimits

Reference mark

Sine

InterfaceTi0000Pin4, 512, 139110231178614

Pin7, 82, 914613512411101–3–

ColourBrownWhiteRedBlueYellowGreenVioletGreyPinkBlackClearOrangeGreen/Yellow*Outer screen

V1+V1-V2+V2-V0+V0-VpVqVxCALInnerOuter

–

Case

–

Case

*Inner shield is connected to 0 V inside the Ti/TD interface

Becomes alarm (E+) for Ti options E, F, G, H

The alarm signal can be output as a line driver signal or 3-state. Please select the preferred option at time of ordering.

On TD interfaces pin 10 should be connected to 0 V to switch to lower resolution.

15 pin ‘D’ type connector

Electrical connections

Grounding and shielding

IMPORTANT: The outer shield should be connected to the machine earth (Field Ground). The inner shield should be connected to 0 V at receiving electronics only. Care should be taken to ensure that the inner and outer shields are insulated from each other. If the inner and outer shields are connected together, this will cause a short between 0 V and earth, which could cause electrical noise issues.

Readhead to interface: 10 mInterface to controller:

Receiver clockfrequency (MHz)

40 to 50<40

Dependent on output frequency. See table below for details.

Maximum cable length (m)

255050

Recommended signal termination

Digital outputs

analogue

Single ended alarm signal termination (Ti options A, B, C, D)

5 V4k7

Customerelectronics

E-1004k7

1k8

100nF

Limit outputs

(Ti interface only)

5-24 V

Vp Vq P Q

*Select R so max current does not exceed 20 mA

Alternatively, use a suitable relay or opto-isolator

Analogue outputs

V0 V1 V2+

V0 V1 V2-

Data sheet

TONiC UHV encoder system

Output speci cations

Data sheet

TONiC UHV encoder system

T16xx linear readhead

Compatible with RGSZ20, RTLC, RSLM or RELM scale.

M = Vacuum cable

T26xx rotary readhead

Compatible with RESM, RESD and REXM rings

M = Vacuum cable

NOTE: Ti and TD interfaces are not UHV compatible

Please contact your local Renishaw representative if you require a partial arc application

Ti interface

Compatible with all

readheads

Interface part numbers Analogue:

Ti 0000 A 00 A

Options

A = dual active high limits

V = 2V5 Vmid dual active high limits

A = P/Q limits - ‘active high’, standard reference markB = P/Q limits - ‘active low’, standard reference markC = P/Q limits - ‘active high’, wide reference markD = P/Q limits - ‘active low’, wide reference mark

E = Q limit only, differential alarm - ‘active high’, standard reference markF = Q limit only, differential alarm - ‘active low’, standard reference markG = Q limit only, differential alarm - ‘active high’, wide reference markH = Q limit only, differential alarm - ‘active low’, wide reference mark

A = Standard reference markB = Wide reference mark

*Contact Renishaw for other interpolation factors.

Renishaw plc

New Mills, Wotton-under-Edge,Gloucestershire GL12 8JRUnited Kingdom

T +44 (0)1453 524524F +44 (0)1453 524901E uk@http://www.77cn.com.cn

http://www.77cn.com.cn

/RTLC

DOP (dual output) encoder systemInstallation guide M-9653-9278Data sheetL-9517-9411

For worldwide contact details, please visit our main website at http://www.77cn.com.cn/contact

RENISHAW HAS MADE CONSIDERABLE EFFORTS TO ENSURE THE CONTENT OF THIS DOCUMENT IS CORRECT AT THE DATE OF PUBLICATION BUT MAKES NO WARRANTIES OR REPRESENTATIONS REGARDING THE CONTENT. RENISHAW EXCLUDES LIABILITY, HOWSOEVER ARISING, FOR ANY INACCURACIES IN THIS DOCUMENT.RENISHAW® and the probe emblem used in the RENISHAW logo are registered trademarks of Renishaw plc in the UK and other countries. apply innovation is a trademark of Renishaw plc.© 2010-2011 Renishaw plc All rights reserved Issued 0911

*L-9517-9426-02*