Data sheet

L-9517-9426-02-A

UHV encoder system

UHV encoder offers all

ts of the established

linear and angle

encoder systems, in a readhead that has been designed and constructed using Ultra-High Vacuum compatible materials and processes.

The UHV readhead is complemented by the latest evolution of RGSZ20 gold tape scale, along with a range of highly accurate linear and angle encoder scales, all featuring optical IN-TRAC reference marks, easy installation,

rugged construction and proven clean RGA spectra. For ultimate reliability and high immunity to optical degradation, UHV readheads incorporate third-generation ltering optics, tuned for even lower noise (jitter), further enhanced by dynamic signal processing including Auto Gain Control and Auto Offset Control.

The result is low sub-divisional error (SDE) giving smoother velocity control for improved scanning performance and increased positional stability. UHV readheads also

feature a detachable analogue or digital interface in the form of a robust, convenient connector that can be located up to 10 mfrom the readhead.

The interface offers digital

interpolation to 1 nm resolution, with clocked outputs for optimised speed performance at all resolutions for industry-standard controllers.The readhead carries an integral set-up LED that enables quick and easy installation. All of these readheads are supplied with an RFI screened UHV compatible cable as standard.

Clean RGA

Low outgassing rates High bake-out temperature of 120 °C

Low power consumption readheads

Non-contact open optical system

Resolution to 1 nm

Dynamic signal processing provides ultra low cyclic error of typically ±30 nm Auto Gain Control ensures constant signal strength for long term reliability

Compatible with RGSZ20 gold scale, FASTRACK/RTLC scale system, RSLM, RELM, RESM and REXM

Data sheet

TONiC UHV encoder system

UHV readhead installation drawing

Dimensions and tolerances in mm

NOTE: RGSZ20 only shown. For detailed installation drawings, refer to relevant TONiC Installation guide or Data sheet

Ti/TD interface installation drawing

Dimensions and tolerances in mm

Data sheet

TONiC UHV encoder system

Operating and electrical speci cations

Power supply

Temperature (system)

(readhead) Humidity (system)

5V ±10% Ripple Storage Operating Bakeout

Readhead only <100 mAT16xx/T26xx + Ti0000 <100 mA

T16xx/T26xx + Ti0004 - Ti20KD or TD4000 - TD0040 <200 mANOTE: Current con sump tion g ures refer to unterminated systems.

For digital outputs, a fur ther 25 mA per chan nel pair (eg A+, A-) will be drawn when ter mi nat ed with 120 Ω.

For analogue outputs, a further 20 mA will be drawn when terminated with 120 Ω.Power from a 5 V dc supply complying with the requirements for SELV of standard EN (IEC) 60950.

200 mVpp maximum @ frequency up to 500 kHz-20 °C to +70 °C 0 °C to +70 °C120 °C

Rated up to 40 °C, 95% relative humidity (non-condensing)IP20IP20

500 m/s² BS EN 60068-2-7:1993 (IEC 68-2-7:1983)

Sealing (readhead) (interface) Acceleration (readhead) Shock (system) Vibration (system) Mass

EMC compliance (system) Environmental Readhead cable

Operating

Non-operating 1000 m/s², 6 ms, ½ sine BS EN 60068-2-27:1993 (IEC 68-2-27:1987)Operating Readhead Interface Cable

100 m/s² max @ 55 Hz to 2000 Hz BS EN 60068-2-6:1996 (IEC 68-2-6:1995)10 g100 g14 g/m

BS EN 61326-1: 2006

Compliant with EU Directive 2002/95/EC (RoHS)Tinned copper braided single screen. FEP core insulation

Speed

Minimum receiver clock frequency

(MHz)5040252012108641

Analogue output

Ti0004

5 µm1010101010101010104.2

Ti00201 µm1010101098.106.484.503.370.84

Ti00400.5 µm10108.106.754.504.003.242.251.680.42

Ti01000.2 µm6.485.403.242.701.801.621.290.900.670.16

Maximum speed (m/s)Ti02000.1 µm3.2402.7001.6201.3500.9000.8100.6480.4500.3380.084

Ti040050 nm1.6251.3500.8100.6700.4500.4000.3240.2250.1690.04210 (-3dB)

Ti100020 nm0.6480.5400.3240.2700.1800.1620.1300.0900.0680.017

Ti200010 nm0.3240.2700.1620.1350.0900.0810.0650.0450.0340.008

Ti40005 nm0.1620.1350.0810.0680.0450.0410.0320.0230.0170.004

Ti10KD2 nm0.0650.0540.0320.0270.0180.0160.0130.0090.00680.0017

Ti20KD1 nm0.0320.0270.0160.0130.0090.00810.00650.00450.00340.0008

Angular speed depends on ring diameter - use the following equation to convert to rev/min. Angular speed (rev/min) =

V x 1000 x 60

D

Where V = maximum linear speed (m/s) and D = external diameter of RESM or REXM (mm)

TD interface maximum speeds are resolution dependent as de ned above.

Data sheet

TONiC UHV encoder system

System features

Reference mark

Form

Selection

Repeatability

IN-TRAC reference mark, directly in incremental track

Refer to RGSZ, FASTRACK/RTLC, RELM, RSLM, RESM, RESD or REXM Data sheets for reference mark location

Bi-directionally repeatable across full speed and temperature rangeElectronically phased, requires no physical adjustment

T16x0: Single reference mark selection by magnetic actuator (A-9653-0143), customer positionedT16x1 and T26x1: No selector required, all reference marks outputUnit of resolution repeatability, over full operating temperature and speed

Dual limit switches (linear systems only, not available on TD interfaces)

Form

Magnetic actuators for P and Q limit switches 10 mm P limit, North pole facing – A-9653-013810 mm Q limit, South pole facing – A-9653-013920 mm P limit, North pole facing – A-9653-023720 mm Q limit, S …… 此处隐藏：9940字，全部文档内容请下载后查看。喜欢就下载吧 ……